Novel algorithms for placement of rectangular covers for mask inspection in advanced lithography and other VLSI design applications.

Kanad Chakraborty Alexey Lvov Maharaj Mukherjee Novel algorithms for placement of rectangular covers for mask inspection in advanced lithography and other VLSI design applications. 79-91 2006 25 IEEE Trans. on CAD of Integrated Circuits and Systems 1 http://dx.doi.org/10.1109/TCAD.2005.853710 db/journals/tcad/tcad25.html#ChakrabortyLM06