BibTeX record journals/tase/LeeYL23

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@article{DBLP:journals/tase/LeeYL23,
  author       = {Tae{-}Gyung Lee and
                  Tae{-}Sun Yu and
                  Tae{-}Eog Lee},
  title        = {Cleaning Plan Optimization for Dual-Armed Cluster Tools With General
                  Chamber Cleaning Periods},
  journal      = {{IEEE} Trans Autom. Sci. Eng.},
  volume       = {20},
  number       = {3},
  pages        = {1890--1906},
  year         = {2023},
  url          = {https://doi.org/10.1109/TASE.2022.3188858},
  doi          = {10.1109/TASE.2022.3188858},
  timestamp    = {Tue, 11 Jul 2023 12:01:54 +0200},
  biburl       = {https://dblp.org/rec/journals/tase/LeeYL23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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