BibTeX record journals/tase/FanHTHC20

download as .bib file

@article{DBLP:journals/tase/FanHTHC20,
  author       = {Shu{-}Kai S. Fan and
                  Chia{-}Yu Hsu and
                  Du{-}Ming Tsai and
                  Fei He and
                  Chun{-}Chung Cheng},
  title        = {Data-Driven Approach for Fault Detection and Diagnostic in Semiconductor
                  Manufacturing},
  journal      = {{IEEE} Trans Autom. Sci. Eng.},
  volume       = {17},
  number       = {4},
  pages        = {1925--1936},
  year         = {2020},
  url          = {https://doi.org/10.1109/TASE.2020.2983061},
  doi          = {10.1109/TASE.2020.2983061},
  timestamp    = {Tue, 20 Oct 2020 18:27:16 +0200},
  biburl       = {https://dblp.org/rec/journals/tase/FanHTHC20.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
a service of  Schloss Dagstuhl - Leibniz Center for Informatics