BibTeX record journals/sensors/ZhuMZL20

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@article{DBLP:journals/sensors/ZhuMZL20,
  author       = {Liang Zhu and
                  Biao Mei and
                  Weidong Zhu and
                  Wei Li},
  title        = {Laser-based Thickness Control in a Double-Side Polishing System for
                  Silicon Wafers},
  journal      = {Sensors},
  volume       = {20},
  number       = {6},
  pages        = {1603},
  year         = {2020},
  url          = {https://doi.org/10.3390/s20061603},
  doi          = {10.3390/S20061603},
  timestamp    = {Sat, 30 May 2020 19:59:44 +0200},
  biburl       = {https://dblp.org/rec/journals/sensors/ZhuMZL20.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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