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BibTeX record journals/sensors/ZhuMZL20
@article{DBLP:journals/sensors/ZhuMZL20, author = {Liang Zhu and Biao Mei and Weidong Zhu and Wei Li}, title = {Laser-based Thickness Control in a Double-Side Polishing System for Silicon Wafers}, journal = {Sensors}, volume = {20}, number = {6}, pages = {1603}, year = {2020}, url = {https://doi.org/10.3390/s20061603}, doi = {10.3390/S20061603}, timestamp = {Sat, 30 May 2020 19:59:44 +0200}, biburl = {https://dblp.org/rec/journals/sensors/ZhuMZL20.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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