BibTeX record journals/sensors/XuZAPB22

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@article{DBLP:journals/sensors/XuZAPB22,
  author       = {Min Xu and
                  Ziqi Zhou and
                  Thomas Ahbe and
                  Erwin Peiner and
                  Uwe Brand},
  title        = {Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry
                  Variation in Roughness Measurements},
  journal      = {Sensors},
  volume       = {22},
  number       = {3},
  pages        = {1298},
  year         = {2022},
  url          = {https://doi.org/10.3390/s22031298},
  doi          = {10.3390/S22031298},
  timestamp    = {Wed, 23 Feb 2022 17:40:46 +0100},
  biburl       = {https://dblp.org/rec/journals/sensors/XuZAPB22.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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