BibTeX record journals/sensors/RochefoucauldDH21

download as .bib file

@article{DBLP:journals/sensors/RochefoucauldDH21,
  author       = {Ombeline de La Rochefoucauld and
                  Guillaume Dovillaire and
                  Fabrice Harms and
                  Mourad Idir and
                  Lei Huang and
                  Xavier Levecq and
                  Martin Piponnier and
                  Philippe Zeitoun},
  title        = {{EUV} and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology,
                  Alignment and Phase Imaging},
  journal      = {Sensors},
  volume       = {21},
  number       = {3},
  pages        = {874},
  year         = {2021},
  url          = {https://doi.org/10.3390/s21030874},
  doi          = {10.3390/S21030874},
  timestamp    = {Tue, 02 Mar 2021 11:25:57 +0100},
  biburl       = {https://dblp.org/rec/journals/sensors/RochefoucauldDH21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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