BibTeX record journals/sensors/Mata-HernandezF20

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@article{DBLP:journals/sensors/Mata-HernandezF20,
  author       = {Diana Mata{-}Hernandez and
                  Daniel Fern{\'{a}}ndez and
                  Saoni Banerji and
                  Jordi Madrenas},
  title        = {Resonant {MEMS} Pressure Sensor in 180 nm {CMOS} Technology Obtained
                  by {BEOL} Isotropic Etching},
  journal      = {Sensors},
  volume       = {20},
  number       = {21},
  pages        = {6037},
  year         = {2020},
  url          = {https://doi.org/10.3390/s20216037},
  doi          = {10.3390/S20216037},
  timestamp    = {Thu, 16 Sep 2021 18:04:58 +0200},
  biburl       = {https://dblp.org/rec/journals/sensors/Mata-HernandezF20.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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