BibTeX record journals/sensors/MaWSZG18

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@article{DBLP:journals/sensors/MaWSZG18,
  author       = {Zhibo Ma and
                  Yinan Wang and
                  Qiang Shen and
                  Han Zhang and
                  Xuetao Guo},
  title        = {Key Processes of Silicon-On-Glass {MEMS} Fabrication Technology for
                  Gyroscope Application},
  journal      = {Sensors},
  volume       = {18},
  number       = {4},
  pages        = {1240},
  year         = {2018},
  url          = {https://doi.org/10.3390/s18041240},
  doi          = {10.3390/S18041240},
  timestamp    = {Wed, 14 Nov 2018 10:47:15 +0100},
  biburl       = {https://dblp.org/rec/journals/sensors/MaWSZG18.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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