BibTeX record journals/sensors/LeeSM21

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@article{DBLP:journals/sensors/LeeSM21,
  author       = {Hoontaek Lee and
                  Kumjae Shin and
                  Wonkyu Moon},
  title        = {Capacitive Measurements of SiO2 Films of Different Thicknesses Using
                  a MOSFET-Based {SPM} Probe},
  journal      = {Sensors},
  volume       = {21},
  number       = {12},
  pages        = {4073},
  year         = {2021},
  url          = {https://doi.org/10.3390/s21124073},
  doi          = {10.3390/S21124073},
  timestamp    = {Mon, 02 Aug 2021 17:36:38 +0200},
  biburl       = {https://dblp.org/rec/journals/sensors/LeeSM21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}