BibTeX record journals/sensors/LeeKLCSY22

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@article{DBLP:journals/sensors/LeeKLCSY22,
  author       = {Young{-}Seok Lee and
                  Si{-}Jun Kim and
                  Jang{-}Jae Lee and
                  Chul{-}Hee Cho and
                  In{-}Ho Seong and
                  Shin{-}Jae You},
  title        = {Low-Temperature Plasma Diagnostics to Investigate the Process Window
                  Shift in Plasma Etching of SiO2},
  journal      = {Sensors},
  volume       = {22},
  number       = {16},
  pages        = {6029},
  year         = {2022},
  url          = {https://doi.org/10.3390/s22166029},
  doi          = {10.3390/S22166029},
  timestamp    = {Mon, 05 Dec 2022 13:32:43 +0100},
  biburl       = {https://dblp.org/rec/journals/sensors/LeeKLCSY22.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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