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BibTeX record journals/sensors/KimLLK22a
@article{DBLP:journals/sensors/KimLLK22a, author = {Kihyun Kim and Yeonsu Lee and Ignacio Llamas{-}Garro and Jung{-}Mu Kim}, title = {Fabrication of Vertical {MEMS} Actuator with Hollow Square Electrode for {SPR} Sensing Applications}, journal = {Sensors}, volume = {22}, number = {23}, pages = {9490}, year = {2022}, url = {https://doi.org/10.3390/s22239490}, doi = {10.3390/S22239490}, timestamp = {Tue, 31 Jan 2023 20:44:21 +0100}, biburl = {https://dblp.org/rec/journals/sensors/KimLLK22a.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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