BibTeX record journals/sensors/KimLLK22a

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@article{DBLP:journals/sensors/KimLLK22a,
  author       = {Kihyun Kim and
                  Yeonsu Lee and
                  Ignacio Llamas{-}Garro and
                  Jung{-}Mu Kim},
  title        = {Fabrication of Vertical {MEMS} Actuator with Hollow Square Electrode
                  for {SPR} Sensing Applications},
  journal      = {Sensors},
  volume       = {22},
  number       = {23},
  pages        = {9490},
  year         = {2022},
  url          = {https://doi.org/10.3390/s22239490},
  doi          = {10.3390/S22239490},
  timestamp    = {Tue, 31 Jan 2023 20:44:21 +0100},
  biburl       = {https://dblp.org/rec/journals/sensors/KimLLK22a.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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