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BibTeX record journals/sensors/KaoDHW09
@article{DBLP:journals/sensors/KaoDHW09, author = {Pin{-}Hsu Kao and Ching{-}Liang Dai and Cheng{-}Chih Hsu and Chyan{-}Chyi Wu}, title = {Manufacture of Micromirror Arrays Using a {CMOS-MEMS} Technique}, journal = {Sensors}, volume = {9}, number = {8}, pages = {6219--6231}, year = {2009}, url = {https://doi.org/10.3390/s90806219}, doi = {10.3390/S90806219}, timestamp = {Sun, 02 Oct 2022 15:48:19 +0200}, biburl = {https://dblp.org/rec/journals/sensors/KaoDHW09.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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