BibTeX record journals/sensors/FanHXB23

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@article{DBLP:journals/sensors/FanHXB23,
  author       = {Angzhi Fan and
                  Yu Huang and
                  Fei Xu and
                  Sthitie Bom},
  title        = {Soft-Sensing Regression Model: From Sensor to Wafer Metrology Forecasting},
  journal      = {Sensors},
  volume       = {23},
  number       = {20},
  pages        = {8363},
  year         = {2023},
  url          = {https://doi.org/10.3390/s23208363},
  doi          = {10.3390/S23208363},
  timestamp    = {Thu, 29 Feb 2024 20:53:19 +0100},
  biburl       = {https://dblp.org/rec/journals/sensors/FanHXB23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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