BibTeX record journals/sensors/CohenCCKFKKFWLE22

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@article{DBLP:journals/sensors/CohenCCKFKKFWLE22,
  author       = {Asaf Cohen and
                  Hagai Cohen and
                  Sidney R. Cohen and
                  Sergey Khodorov and
                  Yishay Feldman and
                  Anna Kossoy and
                  Ifat Kaplan{-}Ashiri and
                  Anatoly I. Frenkel and
                  Ellen Wachtel and
                  Igor Lubomirsky and
                  David Ehre},
  title        = {C-Axis Textured, 2-3 {\(\mu\)}m Thick Al0.75Sc0.25N Films Grown on
                  Chemically Formed TiN/Ti Seeding Layers for {MEMS} Applications},
  journal      = {Sensors},
  volume       = {22},
  number       = {18},
  pages        = {7041},
  year         = {2022},
  url          = {https://doi.org/10.3390/s22187041},
  doi          = {10.3390/S22187041},
  timestamp    = {Sat, 30 Sep 2023 10:25:35 +0200},
  biburl       = {https://dblp.org/rec/journals/sensors/CohenCCKFKKFWLE22.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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