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BibTeX record journals/sensors/CohenCCKFKKFWLE22
@article{DBLP:journals/sensors/CohenCCKFKKFWLE22, author = {Asaf Cohen and Hagai Cohen and Sidney R. Cohen and Sergey Khodorov and Yishay Feldman and Anna Kossoy and Ifat Kaplan{-}Ashiri and Anatoly I. Frenkel and Ellen Wachtel and Igor Lubomirsky and David Ehre}, title = {C-Axis Textured, 2-3 {\(\mu\)}m Thick Al0.75Sc0.25N Films Grown on Chemically Formed TiN/Ti Seeding Layers for {MEMS} Applications}, journal = {Sensors}, volume = {22}, number = {18}, pages = {7041}, year = {2022}, url = {https://doi.org/10.3390/s22187041}, doi = {10.3390/S22187041}, timestamp = {Sat, 30 Sep 2023 10:25:35 +0200}, biburl = {https://dblp.org/rec/journals/sensors/CohenCCKFKKFWLE22.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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