BibTeX record journals/sensors/BoomBHB21

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@article{DBLP:journals/sensors/BoomBHB21,
  author       = {Boris A. Boom and
                  Alessandro Bertolini and
                  Eric Hennes and
                  Jo F. J. van den Brand},
  title        = {Gas Damping in Capacitive {MEMS} Transducers in the Free Molecular
                  Flow Regime},
  journal      = {Sensors},
  volume       = {21},
  number       = {7},
  pages        = {2566},
  year         = {2021},
  url          = {https://doi.org/10.3390/s21072566},
  doi          = {10.3390/S21072566},
  timestamp    = {Sun, 16 May 2021 00:14:02 +0200},
  biburl       = {https://dblp.org/rec/journals/sensors/BoomBHB21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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