BibTeX record journals/qre/KimKK10

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@article{DBLP:journals/qre/KimKK10,
  author       = {Hyun{-}Jin Kim and
                  Kwang{-}Jae Kim and
                  Doh{-}Soon Kwak},
  title        = {A case study on modeling and optimizing photolithography stage of
                  semiconductor fabrication process},
  journal      = {Qual. Reliab. Eng. Int.},
  volume       = {26},
  number       = {7},
  pages        = {765--774},
  year         = {2010},
  url          = {https://doi.org/10.1002/qre.1149},
  doi          = {10.1002/QRE.1149},
  timestamp    = {Thu, 09 Jul 2020 22:56:36 +0200},
  biburl       = {https://dblp.org/rec/journals/qre/KimKK10.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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