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BibTeX record journals/pieee/ODonnell01
@article{DBLP:journals/pieee/ODonnell01, author = {Richard O'Donnell}, title = {Prolog to using advanced simulation to aid microlithography development}, journal = {Proc. {IEEE}}, volume = {89}, number = {8}, pages = {1192--1193}, year = {2001}, url = {https://doi.org/10.1109/JPROC.2001.940287}, doi = {10.1109/JPROC.2001.940287}, timestamp = {Tue, 17 Aug 2021 21:08:03 +0200}, biburl = {https://dblp.org/rec/journals/pieee/ODonnell01.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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