BibTeX record journals/pieee/ODonnell01

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@article{DBLP:journals/pieee/ODonnell01,
  author       = {Richard O'Donnell},
  title        = {Prolog to using advanced simulation to aid microlithography development},
  journal      = {Proc. {IEEE}},
  volume       = {89},
  number       = {8},
  pages        = {1192--1193},
  year         = {2001},
  url          = {https://doi.org/10.1109/JPROC.2001.940287},
  doi          = {10.1109/JPROC.2001.940287},
  timestamp    = {Tue, 17 Aug 2021 21:08:03 +0200},
  biburl       = {https://dblp.org/rec/journals/pieee/ODonnell01.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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