BibTeX record journals/pieee/Meyerson92

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@article{DBLP:journals/pieee/Meyerson92,
  author       = {Bernard S. Meyerson},
  title        = {{UHV/CVD} growth of Si and Si: Ge alloys: chemistry, physics, and
                  device applications},
  journal      = {Proc. {IEEE}},
  volume       = {80},
  number       = {10},
  pages        = {1592--1608},
  year         = {1992},
  url          = {https://doi.org/10.1109/5.168668},
  doi          = {10.1109/5.168668},
  timestamp    = {Thu, 16 Jun 2022 12:12:40 +0200},
  biburl       = {https://dblp.org/rec/journals/pieee/Meyerson92.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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