BibTeX record journals/pieee/EsashiSIWM98

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@article{DBLP:journals/pieee/EsashiSIWM98,
  author       = {Masayoshi Esashi and
                  Susumu Sugiyama and
                  Kyoichi Ikeda and
                  Yuelin Wang and
                  Haruzo Miyashita},
  title        = {Vacuum-sealed silicon micromachined pressure sensors},
  journal      = {Proc. {IEEE}},
  volume       = {86},
  number       = {8},
  pages        = {1627--1639},
  year         = {1998},
  url          = {https://doi.org/10.1109/5.704268},
  doi          = {10.1109/5.704268},
  timestamp    = {Mon, 28 Feb 2022 17:28:52 +0100},
  biburl       = {https://dblp.org/rec/journals/pieee/EsashiSIWM98.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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