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BibTeX record journals/pieee/EsashiSIWM98
@article{DBLP:journals/pieee/EsashiSIWM98, author = {Masayoshi Esashi and Susumu Sugiyama and Kyoichi Ikeda and Yuelin Wang and Haruzo Miyashita}, title = {Vacuum-sealed silicon micromachined pressure sensors}, journal = {Proc. {IEEE}}, volume = {86}, number = {8}, pages = {1627--1639}, year = {1998}, url = {https://doi.org/10.1109/5.704268}, doi = {10.1109/5.704268}, timestamp = {Mon, 28 Feb 2022 17:28:52 +0100}, biburl = {https://dblp.org/rec/journals/pieee/EsashiSIWM98.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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