BibTeX record journals/peng/BrinksmeierVRKMKM13

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@article{DBLP:journals/peng/BrinksmeierVRKMKM13,
  author       = {Ekkard Brinksmeier and
                  Frank Vollertsen and
                  Oltmann Riemer and
                  Michael Koerdt and
                  Axel Meier and
                  Simon Kibben and
                  Jan M{\"{o}}ller},
  title        = {Ultraviolet lithography on sloped surfaces utilizing diamond turned
                  holograms},
  journal      = {Prod. Eng.},
  volume       = {7},
  number       = {6},
  pages        = {619--627},
  year         = {2013},
  url          = {https://doi.org/10.1007/s11740-013-0489-8},
  doi          = {10.1007/S11740-013-0489-8},
  timestamp    = {Mon, 26 Oct 2020 08:22:28 +0100},
  biburl       = {https://dblp.org/rec/journals/peng/BrinksmeierVRKMKM13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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