BibTeX record journals/ors/MorrisonM07

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@article{DBLP:journals/ors/MorrisonM07,
  author       = {James R. Morrison and
                  Donald P. Martin},
  title        = {Performance evaluation of photolithography cluster tools},
  journal      = {{OR} Spectr.},
  volume       = {29},
  number       = {3},
  pages        = {375--389},
  year         = {2007},
  url          = {https://doi.org/10.1007/s00291-006-0061-4},
  doi          = {10.1007/S00291-006-0061-4},
  timestamp    = {Fri, 06 Mar 2020 22:00:34 +0100},
  biburl       = {https://dblp.org/rec/journals/ors/MorrisonM07.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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