BibTeX record journals/mr/YingG04

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@article{DBLP:journals/mr/YingG04,
  author       = {Yu Ying and
                  Peter Grant},
  title        = {Deformation measurement of {RF} {MEMS} switches by optical interference},
  journal      = {Microelectron. Reliab.},
  volume       = {44},
  number       = {6},
  pages        = {951--955},
  year         = {2004},
  url          = {https://doi.org/10.1016/j.microrel.2004.02.006},
  doi          = {10.1016/J.MICROREL.2004.02.006},
  timestamp    = {Sat, 22 Feb 2020 19:28:05 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/YingG04.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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