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DBLP BibTeX Record 'journals/mr/YangCDSWLC02'

@article{DBLP:journals/mr/YangCDSWLC02,
  author    = {Bing-Liang Yang and
               N. W. Cheung and
               S. Denholm and
               J. Shao and
               Hei Wong and
               P. T. Lai and
               Y. C. Cheng},
  title     = {Ultra-shallow n$^{\mbox{+}}$p junction formed by PH$_{\mbox{3}}$
               and AsH$_{\mbox{3}}$ plasma immersion ion implantation},
  journal   = {Microelectronics Reliability},
  volume    = {42},
  number    = {12},
  year      = {2002},
  pages     = {1985-1989},
  ee        = {http://dx.doi.org/10.1016/S0026-2714(02)00099-9},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}