BibTeX record: journals/mr/YangCDSWLC02

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@article{DBLP:journals/mr/YangCDSWLC02,
  author    = {Bing{-}Liang Yang and
               N. W. Cheung and
               S. Denholm and
               J. Shao and
               Hei Wong and
               P. T. Lai and
               Y. C. Cheng},
  title     = {Ultra-shallow n\({}^{\mbox{+}}\)p junction formed by PH\({}_{\mbox{3}}\)
               and AsH\({}_{\mbox{3}}\) plasma immersion ion implantation},
  journal   = {Microelectronics Reliability},
  year      = {2002},
  volume    = {42},
  number    = {12},
  pages     = {1985--1989},
  url       = {http://dx.doi.org/10.1016/S0026-2714(02)00099-9},
  doi       = {10.1016/S0026-2714(02)00099-9},
  timestamp = {Fri, 24 Oct 2014 19:11:10 +0200},
  biburl    = {http://dblp.uni-trier.de/rec/bib/journals/mr/YangCDSWLC02},
  bibsource = {dblp computer science bibliography, http://dblp.org}
}