BibTeX record journals/mr/WongWCKC06

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@article{DBLP:journals/mr/WongWCKC06,
  author       = {C. K. Wong and
                  Hei Wong and
                  Mansun Chan and
                  Chi{-}Wah Kok and
                  H. P. Chan},
  title        = {Minimizing hydrogen content in silicon oxynitride by thermal oxidation
                  of silicon-rich silicon nitride},
  journal      = {Microelectron. Reliab.},
  volume       = {46},
  number       = {12},
  pages        = {2056--2061},
  year         = {2006},
  url          = {https://doi.org/10.1016/j.microrel.2006.01.006},
  doi          = {10.1016/J.MICROREL.2006.01.006},
  timestamp    = {Sat, 22 Feb 2020 19:28:38 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/WongWCKC06.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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