BibTeX record journals/mr/WeberHHKSHBJNNF01

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@article{DBLP:journals/mr/WeberHHKSHBJNNF01,
  author       = {Detlef Weber and
                  F. H{\"{o}}hnsdorf and
                  A. Hausmann and
                  A. Klipp and
                  Z. Stavreva and
                  J. Herrmann and
                  L. Bauch and
                  M. Junack and
                  H. Neef and
                  M. Nichterwitz and
                  S. Finsterbusch},
  title        = {Impact of substituting SiO\({}_{\mbox{2}}\) {ILD} by low k materials
                  into AlCu {RIE} metallization},
  journal      = {Microelectron. Reliab.},
  volume       = {41},
  number       = {7},
  pages        = {1081--1083},
  year         = {2001},
  url          = {https://doi.org/10.1016/S0026-2714(01)00077-4},
  doi          = {10.1016/S0026-2714(01)00077-4},
  timestamp    = {Thu, 10 Aug 2023 08:30:05 +0200},
  biburl       = {https://dblp.org/rec/journals/mr/WeberHHKSHBJNNF01.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}