BibTeX record journals/mr/WangTGVSWWW11

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@article{DBLP:journals/mr/WangTGVSWWW11,
  author       = {Bo Wang and
                  Shuji Tanaka and
                  B. Guo and
                  G. Vereecke and
                  Simone Severi and
                  Ann Witvrouw and
                  Martine Wevers and
                  Ingrid De Wolf},
  title        = {Outgassing study of thin films used for poly-SiGe based vacuum packaging
                  of {MEMS}},
  journal      = {Microelectron. Reliab.},
  volume       = {51},
  number       = {9-11},
  pages        = {1878--1881},
  year         = {2011},
  url          = {https://doi.org/10.1016/j.microrel.2011.06.022},
  doi          = {10.1016/J.MICROREL.2011.06.022},
  timestamp    = {Tue, 22 Dec 2020 09:47:50 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/WangTGVSWWW11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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