BibTeX record journals/mr/WangCWW13

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@article{DBLP:journals/mr/WangCWW13,
  author       = {B. Wang and
                  Jeroen De Coster and
                  Martine Wevers and
                  Ingrid De Wolf},
  title        = {A novel method to measure the internal pressure of {MEMS} thin-film
                  packages},
  journal      = {Microelectron. Reliab.},
  volume       = {53},
  number       = {9-11},
  pages        = {1663--1666},
  year         = {2013},
  url          = {https://doi.org/10.1016/j.microrel.2013.07.098},
  doi          = {10.1016/J.MICROREL.2013.07.098},
  timestamp    = {Mon, 26 Oct 2020 08:59:27 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/WangCWW13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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