BibTeX record journals/mr/WahabAHS12

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@article{DBLP:journals/mr/WahabAHS12,
  author       = {Yasmin Abdul Wahab and
                  Anuar Fadzil Ahmad and
                  Hanim Hussin and
                  Norhayati Soin},
  title        = {Reduction of annealed-induced wafer defects in dual-damascene copper
                  interconnects},
  journal      = {Microelectron. Reliab.},
  volume       = {52},
  number       = {9-10},
  pages        = {1975--1980},
  year         = {2012},
  url          = {https://doi.org/10.1016/j.microrel.2012.07.008},
  doi          = {10.1016/J.MICROREL.2012.07.008},
  timestamp    = {Fri, 04 Feb 2022 08:29:29 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/WahabAHS12.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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