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BibTeX record journals/mr/UusluotoJLT04
@article{DBLP:journals/mr/UusluotoJLT04, author = {Teija Uusluoto and Paavo Jalonen and Harri Laaksonen and Aulis Tuominen}, title = {Metallization of microvias by sputter-deposition}, journal = {Microelectron. Reliab.}, volume = {44}, number = {4}, pages = {587--593}, year = {2004}, url = {https://doi.org/10.1016/j.microrel.2003.08.001}, doi = {10.1016/J.MICROREL.2003.08.001}, timestamp = {Sat, 22 Feb 2020 19:27:48 +0100}, biburl = {https://dblp.org/rec/journals/mr/UusluotoJLT04.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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