DBLP Record 'journals/mr/TanRTYL05'

BibTeX

@article{DBLP:journals/mr/TanRTYL05,
  author    = {Cher Ming Tan and
               Arijit Roy and
               Kok Tong Tan and
               Derek Sim Kwang Ye and
               Frankie Low},
  title     = {Effect of vacuum break after the barrier layer deposition
               on the electromigration performance of aluminum based line
               interconnects},
  journal   = {Microelectronics Reliability},
  volume    = {45},
  number    = {9-11},
  year      = {2005},
  pages     = {1449-1454},
  ee        = {http://dx.doi.org/10.1016/j.microrel.2005.07.045},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}