BibTeX record journals/mr/StadlerGBDPHBE01

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@article{DBLP:journals/mr/StadlerGBDPHBE01,
  author       = {A. Stadler and
                  I. Genchev and
                  A. Bergmaier and
                  G. Dollinger and
                  Vesselinka Petrova{-}Koch and
                  Walter Hansch and
                  H. Baumg{\"{a}}rtner and
                  I. Eisele},
  title        = {Nitrogen implantations for rapid thermal oxinitride layers},
  journal      = {Microelectron. Reliab.},
  volume       = {41},
  number       = {7},
  pages        = {977--980},
  year         = {2001},
  url          = {https://doi.org/10.1016/S0026-2714(01)00051-8},
  doi          = {10.1016/S0026-2714(01)00051-8},
  timestamp    = {Mon, 18 Sep 2023 20:44:04 +0200},
  biburl       = {https://dblp.org/rec/journals/mr/StadlerGBDPHBE01.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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