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BibTeX record journals/mr/ScholzHSLKB14
@article{DBLP:journals/mr/ScholzHSLKB14, author = {Philipp Scholz and Norbert Herfurth and Michael Sadowski and Ted R. Lundquist and Uwe Kerst and Christian Boit}, title = {Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials - An adaptive calibration algorithm}, journal = {Microelectron. Reliab.}, volume = {54}, number = {9-10}, pages = {1794--1797}, year = {2014}, url = {https://doi.org/10.1016/j.microrel.2014.07.062}, doi = {10.1016/J.MICROREL.2014.07.062}, timestamp = {Sat, 22 Feb 2020 19:27:16 +0100}, biburl = {https://dblp.org/rec/journals/mr/ScholzHSLKB14.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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