BibTeX record journals/mr/SchoenfelderELBB07

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@article{DBLP:journals/mr/SchoenfelderELBB07,
  author       = {Stephan Schoenfelder and
                  Matthias Ebert and
                  Christof Landesberger and
                  Karlheinz Bock and
                  J{\"{o}}rg Bagdahn},
  title        = {Investigations of the influence of dicing techniques on the strength
                  properties of thin silicon},
  journal      = {Microelectron. Reliab.},
  volume       = {47},
  number       = {2-3},
  pages        = {168--178},
  year         = {2007},
  url          = {https://doi.org/10.1016/j.microrel.2006.09.002},
  doi          = {10.1016/J.MICROREL.2006.09.002},
  timestamp    = {Mon, 26 Oct 2020 08:59:29 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/SchoenfelderELBB07.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}