BibTeX record journals/mr/SchlangenKKB05

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@article{DBLP:journals/mr/SchlangenKKB05,
  author       = {Rudolf Schlangen and
                  Uwe Kerst and
                  A. Kabakow and
                  Christian Boit},
  title        = {Electrical Performance Evaluation of {FIB} Edited Circuits through
                  Chip Backside Exposing Shallow Trench Isolations},
  journal      = {Microelectron. Reliab.},
  volume       = {45},
  number       = {9-11},
  pages        = {1544--1549},
  year         = {2005},
  url          = {https://doi.org/10.1016/j.microrel.2005.07.033},
  doi          = {10.1016/J.MICROREL.2005.07.033},
  timestamp    = {Sat, 22 Feb 2020 19:28:57 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/SchlangenKKB05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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