BibTeX record journals/mr/SaghaeianKSM18

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@article{DBLP:journals/mr/SaghaeianKSM18,
  author       = {F. Saghaeian and
                  J. Keckes and
                  K. A. Schreiber and
                  T. Mittereder},
  title        = {Design and development of MEMS-based structures for in-situ characterization
                  of thermo-mechanical behaviour of thin metal films},
  journal      = {Microelectron. Reliab.},
  volume       = {88-90},
  pages        = {829--834},
  year         = {2018},
  url          = {https://doi.org/10.1016/j.microrel.2018.07.005},
  doi          = {10.1016/J.MICROREL.2018.07.005},
  timestamp    = {Sat, 22 Feb 2020 19:28:14 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/SaghaeianKSM18.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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