BibTeX record journals/mr/SagarBML16

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@article{DBLP:journals/mr/SagarBML16,
  author       = {James T. Sagar and
                  Simon R. Burgess and
                  Connor McCarthy and
                  Xiaobing Li},
  title        = {Elemental characterisation of sub 20 nm structures in devices using
                  new {SEM-EDS} technology},
  journal      = {Microelectron. Reliab.},
  volume       = {64},
  pages        = {367--369},
  year         = {2016},
  url          = {https://doi.org/10.1016/j.microrel.2016.07.080},
  doi          = {10.1016/J.MICROREL.2016.07.080},
  timestamp    = {Tue, 15 Dec 2020 08:24:18 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/SagarBML16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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