BibTeX record journals/mr/RowePSWD03

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@article{DBLP:journals/mr/RowePSWD03,
  author       = {William J. Rowe and
                  Bruce M. Paine and
                  Adele E. Schmitz and
                  Robert H. Walden and
                  Michael J. Delaney},
  title        = {Reliability of 100 nm silicon nitride capacitors in an InP {HEMT}
                  {MMIC} process},
  journal      = {Microelectron. Reliab.},
  volume       = {43},
  number       = {6},
  pages        = {845--851},
  year         = {2003},
  url          = {https://doi.org/10.1016/S0026-2714(03)00069-6},
  doi          = {10.1016/S0026-2714(03)00069-6},
  timestamp    = {Sat, 22 Feb 2020 19:29:03 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/RowePSWD03.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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