BibTeX record journals/mr/RodriguezAGHGP06

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@article{DBLP:journals/mr/RodriguezAGHGP06,
  author       = {Nicolas Rodriguez and
                  J{\'{e}}r{\^{o}}me Adrian and
                  Catherine Grosjean and
                  G{\'{e}}rald Haller and
                  Christophe Girardeaux and
                  Alain Portavoce},
  title        = {Evaluation of scanning capacitance microscopy sample preparation by
                  focused ion beam},
  journal      = {Microelectron. Reliab.},
  volume       = {46},
  number       = {9-11},
  pages        = {1554--1557},
  year         = {2006},
  url          = {https://doi.org/10.1016/j.microrel.2006.07.019},
  doi          = {10.1016/J.MICROREL.2006.07.019},
  timestamp    = {Thu, 03 Aug 2023 15:52:37 +0200},
  biburl       = {https://dblp.org/rec/journals/mr/RodriguezAGHGP06.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}