BibTeX record journals/mr/PlappertHKN12

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@article{DBLP:journals/mr/PlappertHKN12,
  author       = {Mathias Plappert and
                  Oliver Humbel and
                  Angelika Koprowski and
                  Mathias Nowottnick},
  title        = {Characterization of Ti diffusion in {PVD} deposited WTi/AlCu metallization
                  on monocrystalline Si by means of secondary ion mass spectroscopy},
  journal      = {Microelectron. Reliab.},
  volume       = {52},
  number       = {9-10},
  pages        = {1993--1997},
  year         = {2012},
  url          = {https://doi.org/10.1016/j.microrel.2012.06.066},
  doi          = {10.1016/J.MICROREL.2012.06.066},
  timestamp    = {Tue, 30 Mar 2021 10:21:35 +0200},
  biburl       = {https://dblp.org/rec/journals/mr/PlappertHKN12.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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