BibTeX record journals/mr/NgZKPW03

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@article{DBLP:journals/mr/NgZKPW03,
  author       = {K. L. Ng and
                  Nian Zhan and
                  Chi{-}Wah Kok and
                  M. C. Poon and
                  Hei Wong},
  title        = {Electrical characterization of the hafnium oxide prepared by direct
                  sputtering of Hf in oxygen with rapid thermal annealing},
  journal      = {Microelectron. Reliab.},
  volume       = {43},
  number       = {8},
  pages        = {1289--1293},
  year         = {2003},
  url          = {https://doi.org/10.1016/S0026-2714(03)00141-0},
  doi          = {10.1016/S0026-2714(03)00141-0},
  timestamp    = {Sat, 22 Feb 2020 19:29:18 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/NgZKPW03.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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