BibTeX record journals/mr/NelhiebelWDTB05

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@article{DBLP:journals/mr/NelhiebelWDTB05,
  author       = {Michael Nelhiebel and
                  J. Wissenwasser and
                  Thomas Detzel and
                  A. Timmerer and
                  E. Bertagnolli},
  title        = {Hydrogen-related influence of the metallization stack on characteristics
                  and reliability of a trench gate oxide},
  journal      = {Microelectron. Reliab.},
  volume       = {45},
  number       = {9-11},
  pages        = {1355--1359},
  year         = {2005},
  url          = {https://doi.org/10.1016/j.microrel.2005.07.020},
  doi          = {10.1016/J.MICROREL.2005.07.020},
  timestamp    = {Sat, 22 Feb 2020 19:27:52 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/NelhiebelWDTB05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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