BibTeX record journals/mr/MullerMMMWGH02

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@article{DBLP:journals/mr/MullerMMMWGH02,
  author       = {Anne{-}Dorothea M{\"{u}}ller and
                  Falk M{\"{u}}ller and
                  J{\"{u}}rgen Middeke and
                  Jan Mehner and
                  J. Wibbeler and
                  Thomas Gessner and
                  Michael Hietschold},
  title        = {Double-cantilever device for Atomic Force Microscopy in dynamic noncontact-mode},
  journal      = {Microelectron. Reliab.},
  volume       = {42},
  number       = {9-11},
  pages        = {1685--1688},
  year         = {2002},
  url          = {https://doi.org/10.1016/S0026-2714(02)00212-3},
  doi          = {10.1016/S0026-2714(02)00212-3},
  timestamp    = {Sat, 30 Sep 2023 10:21:34 +0200},
  biburl       = {https://dblp.org/rec/journals/mr/MullerMMMWGH02.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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