BibTeX record journals/mr/MataboschCKETC13

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@article{DBLP:journals/mr/MataboschCKETC13,
  author       = {Nuria Torres Matabosch and
                  Fabio Coccetti and
                  Mehmet Kaynak and
                  Beatrice Espana and
                  Bernd Tillack and
                  Jean{-}Louis Cazaux},
  title        = {Failure analysis and detection methodology for capacitive {RF-MEMS}
                  switches based on {BEOL} BiCMOS process},
  journal      = {Microelectron. Reliab.},
  volume       = {53},
  number       = {9-11},
  pages        = {1659--1662},
  year         = {2013},
  url          = {https://doi.org/10.1016/j.microrel.2013.07.099},
  doi          = {10.1016/J.MICROREL.2013.07.099},
  timestamp    = {Wed, 18 Aug 2021 14:20:43 +0200},
  biburl       = {https://dblp.org/rec/journals/mr/MataboschCKETC13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}