Layout dependency induced deviation from Poisson area scaling in BEOL dielectric reliability.

Y.-L. Li Zs. Tökei Ph. Roussel Guido Groeseneken Karen Maex Layout dependency induced deviation from Poisson area scaling in BEOL dielectric reliability. 1299-1304 2005 45 Microelectronics Reliability 9-11 http://dx.doi.org/10.1016/j.microrel.2005.07.010 db/journals/mr/mr45.html#LiTRGM05