BibTeX record journals/mr/LeiWTIFTYK18

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@article{DBLP:journals/mr/LeiWTIFTYK18,
  author       = {Yiming Lei and
                  Hitoshi Wakabayashi and
                  Kazuo Tsutsui and
                  Hiroshi Iwai and
                  Masayuki Furuhashi and
                  Shingo Tomohisa and
                  Satoshi Yamakawa and
                  Kuniyuki Kakushima},
  title        = {Improvement of SiO\({}_{\mbox{2}}\)/4H-SiC Interface properties by
                  post-metallization annealing},
  journal      = {Microelectron. Reliab.},
  volume       = {84},
  pages        = {226--229},
  year         = {2018},
  url          = {https://doi.org/10.1016/j.microrel.2018.03.036},
  doi          = {10.1016/J.MICROREL.2018.03.036},
  timestamp    = {Sat, 22 Feb 2020 19:26:53 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/LeiWTIFTYK18.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}