BibTeX record journals/mr/KoutsoureliSP17

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@article{DBLP:journals/mr/KoutsoureliSP17,
  author       = {Matroni Koutsoureli and
                  N. Siannas and
                  George J. Papaioannou},
  title        = {Temperature accelerated discharging processes through the bulk of
                  {PECVD} silicon nitride films for {MEMS} capacitive switches},
  journal      = {Microelectron. Reliab.},
  volume       = {76-77},
  pages        = {631--634},
  year         = {2017},
  url          = {https://doi.org/10.1016/j.microrel.2017.07.018},
  doi          = {10.1016/J.MICROREL.2017.07.018},
  timestamp    = {Sun, 02 Oct 2022 15:44:01 +0200},
  biburl       = {https://dblp.org/rec/journals/mr/KoutsoureliSP17.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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