Effect of mechanical stress induced by etch-stop nitride: impact on deep-submicron transistor performance.

Shinya Ito Hiroaki Namba Tsuyoshi Hirata Koichi Ando Shin Koyama Nobuyuki Ikezawa Tatsuya Suzuki Takehiro Saitoh Tadahiko Horiuchi Effect of mechanical stress induced by etch-stop nitride: impact on deep-submicron transistor performance. 201-209 2002 42 Microelectronics Reliability 2 http://dx.doi.org/10.1016/S0026-2714(01)00238-4 db/journals/mr/mr42.html#ItoNHAKISSH02