ItoNHAKISSH02'

@article{DBLP:journals/mr/ItoNHAKISSH02,
  author    = {Shinya Ito and
               Hiroaki Namba and
               Tsuyoshi Hirata and
               Koichi Ando and
               Shin Koyama and
               Nobuyuki Ikezawa and
               Tatsuya Suzuki and
               Takehiro Saitoh and
               Tadahiko Horiuchi},
  title     = {Effect of mechanical stress induced by etch-stop nitride:
               impact on deep-submicron transistor performance},
  journal   = {Microelectronics Reliability},
  volume    = {42},
  number    = {2},
  year      = {2002},
  pages     = {201-209},
  ee        = {http://dx.doi.org/10.1016/S0026-2714(01)00238-4},
  bibsource = {DBLP, http://dblp.uni-trier.de}
}