BibTeX record journals/mr/Ikeda01

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@article{DBLP:journals/mr/Ikeda01,
  author       = {Kazuko Ikeda},
  title        = {Evaluation method for the control of process induced defect in deep
                  sub-micron device fabrication},
  journal      = {Microelectron. Reliab.},
  volume       = {41},
  number       = {9-10},
  pages        = {1525--1533},
  year         = {2001},
  url          = {https://doi.org/10.1016/S0026-2714(01)00161-5},
  doi          = {10.1016/S0026-2714(01)00161-5},
  timestamp    = {Sat, 22 Feb 2020 19:26:50 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/Ikeda01.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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