BibTeX record journals/mr/HoferBBWG13

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@article{DBLP:journals/mr/HoferBBWG13,
  author       = {Alexander Hofer and
                  Roland Biberger and
                  G{\"{u}}nther Benstetter and
                  Bj{\"{o}}rn Wilke and
                  Holger G{\"{o}}bel},
  title        = {Scanning probe microscopy based electrical characterization of thin
                  dielectric and organic semiconductor films},
  journal      = {Microelectron. Reliab.},
  volume       = {53},
  number       = {9-11},
  pages        = {1430--1433},
  year         = {2013},
  url          = {https://doi.org/10.1016/j.microrel.2013.07.086},
  doi          = {10.1016/J.MICROREL.2013.07.086},
  timestamp    = {Wed, 07 Dec 2022 23:04:38 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/HoferBBWG13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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